dc.contributor.author | Martin Hoyas, Ana | |
dc.contributor.author | Travaly, Youssef | |
dc.contributor.author | Schuhmacher, Jorg | |
dc.contributor.author | Sajavaara, Timo | |
dc.contributor.author | Whelan, Caroline | |
dc.contributor.author | Eyckens, Brenda | |
dc.contributor.author | Richard, Olivier | |
dc.contributor.author | Giangrandi, | |
dc.contributor.author | Brijs, Bert | |
dc.contributor.author | Jonas, A.M. | |
dc.contributor.author | Vantomme, Andre | |
dc.contributor.author | Vandervorst, Wilfried | |
dc.contributor.author | Celis, Jean-Pierre | |
dc.contributor.author | Maex, Karen | |
dc.date.accessioned | 2021-10-16T03:20:33Z | |
dc.date.available | 2021-10-16T03:20:33Z | |
dc.date.issued | 2005 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/10866 | |
dc.source | IIOimport | |
dc.title | Characterization of the growth of atomic layer deposited WNxCy films on various substrates | |
dc.type | Oral presentation | |
dc.contributor.imecauthor | Richard, Olivier | |
dc.contributor.imecauthor | Vantomme, Andre | |
dc.contributor.imecauthor | Vandervorst, Wilfried | |
dc.contributor.imecauthor | Maex, Karen | |
dc.contributor.orcidimec | Richard, Olivier::0000-0002-3994-8021 | |
dc.source.peerreview | no | |
dc.source.conference | AVS 2005 | |
dc.source.conferencedate | 21/03/2005 | |
dc.source.conferencelocation | Santa Clara, CA USA | |
imec.availability | Published - imec | |