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Accurate determination of channel length, series resistance and junction doping profile for MOSFET optimisation in deep submicron technologies
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Authors
Biesemans, Serge
;
Hendriks, Marton
;
Kubicek, Stefan
;
De Meyer, Kristin
Conference
Symposium on VLSI Technology
Title
Accurate determination of channel length, series resistance and junction doping profile for MOSFET optimisation in deep submicron technologies
Publication type
Proceedings paper
Embargo date
9999-12-31
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