Publication:

On the application of a thin ozone based wet chemical oxide as an interface for ALD high-k deposition

Date

2005

Proceedings Paper

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Author(s)

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Conard, Thierry

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De Gendt, Stefan

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De Smedt, Frank

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Delabie, Annelies

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Vinckier, Chris

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Acq. date: 2026-04-27