Authors

Onsia, Bart; Caymax, Matty; Conard, Thierry; De Gendt, Stefan; De Smedt, Frank; Delabie, Annelies; Gottschalk, C.; Green, M.; Heyns, Marc; Lin, S.; Mertens, Paul; Tsai, Wilman; Vinckier, Chris

Conference

Ultra Clean Processing of Silicon Surfaces VII: Proceedings of the 7th International Symposium

Title

On the application of a thin ozone based wet chemical oxide as an interface for ALD high-k deposition

Publication type

Proceedings paper