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Breakdown induced thermo-chemical reactions in HfO2 high-k/poly-silicon gate stacks
Publication:
Breakdown induced thermo-chemical reactions in HfO2 high-k/poly-silicon gate stacks
Date
2005
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Ranjan, R.
;
Pey, K.L.
;
Tung, C.H.
;
Tang, L.J.
;
Ang, D.S.
;
Groeseneken, Guido
;
De Gendt, Stefan
;
Bera, L.K.
Journal
Applied Physics Letters
Abstract
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Views
1939
since deposited on 2021-10-16
Acq. date: 2025-10-26
Citations
Metrics
Views
1939
since deposited on 2021-10-16
Acq. date: 2025-10-26
Citations