Breakdown induced thermo-chemical reactions in HfO2 high-k/poly-silicon gate stacks

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Authors

Ranjan, R.; Pey, K.L.; Tung, C.H.; Tang, L.J.; Ang, D.S.; Groeseneken, Guido; De Gendt, Stefan; Bera, L.K.

Issue

24

Journal

Applied Physics Letters

Volume

87

Title

Breakdown induced thermo-chemical reactions in HfO2 high-k/poly-silicon gate stacks

Publication type

Journal article

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