Publication:
Damage layer in silica-based low-k material induced by the patterning plasma process studied by energy-filtered TEM
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1882 since deposited on 2021-10-16
2last month
Acq. date: 2026-01-10
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Metrics
Views
1882 since deposited on 2021-10-16
2last month
Acq. date: 2026-01-10
Citations