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Ultra-thin BCB bonding for heterogeneous integration of III-V devices and SOI photonic components
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Authors
Roelkens, Gunther
;
Van Thourhout, Dries
;
Christiaens, Ilse
;
Baets, Roel
;
Smit, Meint
Conference
12th European Conference on Integrated Optics (ECIO)
Title
Ultra-thin BCB bonding for heterogeneous integration of III-V devices and SOI photonic components
Publication type
Proceedings paper
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