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Impact of dielectric charging on the actuation of electrostatic MEM devices
Publication:
Impact of dielectric charging on the actuation of electrostatic MEM devices
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Date
2005
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Rottenberg, Xavier
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Abstract
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1871
since deposited on 2021-10-16
Acq. date: 2025-12-18
Citations
Metrics
Views
1871
since deposited on 2021-10-16
Acq. date: 2025-12-18
Citations