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Impact of dielectric charging on the actuation of electrostatic MEM devices

dc.contributor.authorRottenberg, Xavier
dc.date.accessioned2021-10-16T04:39:47Z
dc.date.available2021-10-16T04:39:47Z
dc.date.issued2005
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/11132
dc.sourceIIOimport
dc.titleImpact of dielectric charging on the actuation of electrostatic MEM devices
dc.typeOral presentation
dc.contributor.imecauthorRottenberg, Xavier
dc.source.peerreviewno
dc.source.conferenceSymposium on Design, Test, Integration and Packaging of MEMS/MOEMS
dc.source.conferencedate30/05/2005
dc.source.conferencelocationMontreux Switzerland
imec.availabilityPublished - imec
imec.internalnotesCourse in the frame of the AMICOM RF-MEMS workshop on Design and Modelling Methods for RF MEMS


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