Authors

Satta, Alessandra; Simoen, Eddy; Clarysse, Trudo; Janssens, Tom; Benedetti, Alessandro; De Jaeger, Brice; Meuris, Marc; Vandervorst, Wilfried

Issue

17

Journal

Applied Physics letters

Volume

87

Title

Diffusion, activation and recrystallization of boron implanted in preamorphized and crystalline germanium

Publication type

Journal article