Micromachining of pulsed laser annealed PECVD SixGe1-x deposited at temperatures <=370°C

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Authors
Sedky, Sherif; Witvrouw, Ann
Conference
Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems - MEMS
Title
Micromachining of pulsed laser annealed PECVD SixGe1-x deposited at temperatures <=370°C
Publication type
Proceedings paper
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