Publication:
Micromachining of pulsed laser annealed PECVD SixGe1-x deposited at temperatures <=370°C
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1791 since deposited on 2021-10-16
1last month
Acq. date: 2026-01-06
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Views
1791 since deposited on 2021-10-16
1last month
Acq. date: 2026-01-06
Citations