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Micromachining of pulsed laser annealed PECVD SixGe1-x deposited at temperatures <=370°C

dc.contributor.authorSedky, Sherif
dc.contributor.authorWitvrouw, Ann
dc.date.accessioned2021-10-16T04:57:33Z
dc.date.available2021-10-16T04:57:33Z
dc.date.issued2005-01
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/11186
dc.sourceIIOimport
dc.titleMicromachining of pulsed laser annealed PECVD SixGe1-x deposited at temperatures <=370°C
dc.typeProceedings paper
dc.source.peerreviewno
dc.source.beginpage487
dc.source.endpage490
dc.source.conferenceProceedings of the IEEE International Conference on Micro Electro Mechanical Systems - MEMS
dc.source.conferencedate30/01/2005
dc.source.conferencelocationMiami Beach, FL USA
imec.availabilityPublished - imec


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