Authors

Shi, Xiaoping; Schaekers, Marc; Brus, Stephan; Zhao, Chao; Brijs, Bert; Yu, HongYu; Kottantharayil, Anil

Conference

The 8th Technical and Scientific Meeting of CREMSI:FEOL from 130 to 65 nm : scaling challenges

Title

Deposition of Poly-SiGe with RTCVD

Publication type

Proceedings paper