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Hydrogen-plasma-enhanced thermal donor formation in n-type high-ressitivity MCZ silicon
Publication:
Hydrogen-plasma-enhanced thermal donor formation in n-type high-ressitivity MCZ silicon
Date
2005
Proceedings Paper
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Simoen, Eddy
;
Huang, Y.L.
;
Claeys, Cor
;
Rafi, J.M.
;
Job, R.
;
Fahrner, W.R.
;
Versluijs, Janko
;
Clauws, P.
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1954
since deposited on 2021-10-16
Acq. date: 2025-10-23
Citations
Metrics
Views
1954
since deposited on 2021-10-16
Acq. date: 2025-10-23
Citations