Metal gate work function extraction using Fowler-Nordheim tunneling techniques

Thumbnail
Metadata
Show full item record
Authors
Sjöblom, G.; Pantisano, Luigi; Schram, Tom; Olsson, J.; Afanas'ev, V.; Heyns, Marc
Journal
Microelectronic Engineering
Volume
80
Title
Metal gate work function extraction using Fowler-Nordheim tunneling techniques
Publication type
Journal article
Collections