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Resist rework on metal hardmask in a Low-plasma damage patterning approach

dc.contributor.authorStruyf, Herbert
dc.contributor.authorHendrickx, Dirk
dc.contributor.authorMannaert, Geert
dc.contributor.authorBoullart, Werner
dc.contributor.authorVanhaelemeersch, Serge
dc.date.accessioned2021-10-16T05:31:30Z
dc.date.available2021-10-16T05:31:30Z
dc.date.issued2005-12
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/11288
dc.sourceIIOimport
dc.titleResist rework on metal hardmask in a Low-plasma damage patterning approach
dc.typeProceedings paper
dc.contributor.imecauthorStruyf, Herbert
dc.contributor.imecauthorHendrickx, Dirk
dc.contributor.imecauthorMannaert, Geert
dc.contributor.imecauthorBoullart, Werner
dc.contributor.imecauthorVanhaelemeersch, Serge
dc.contributor.orcidimecBoullart, Werner::0000-0001-7614-2097
dc.contributor.orcidimecVanhaelemeersch, Serge::0000-0003-2102-7395
dc.source.peerreviewyes
dc.source.beginpage33
dc.source.endpage34
dc.source.conferenceProceedings 27th Dry Process Symposium
dc.source.conferencedate28/11/2005
dc.source.conferencelocationJeju Korea
imec.availabilityPublished - imec


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