Publication:
Barrier reliability of ALD TaN on sub-100 nm copper low-k interconnects
Date
Loading...
Files
Journal
Abstract
Description
Statistics
Views
1976 since deposited on 2021-10-16
2last month
Acq. date: 2026-05-18
Citations
Statistics
Views
1976 since deposited on 2021-10-16
2last month
Acq. date: 2026-05-18
Citations