dc.contributor.author | Tokei, Zsolt | |
dc.contributor.author | Gailledrat, Thomas | |
dc.contributor.author | Li, Yunlong | |
dc.contributor.author | Schuhmacher, Jorg | |
dc.contributor.author | Mandrekar, T. | |
dc.contributor.author | Guggilla, S. | |
dc.contributor.author | Mebarki, B. | |
dc.contributor.author | Maex, Karen | |
dc.date.accessioned | 2021-10-16T05:44:54Z | |
dc.date.available | 2021-10-16T05:44:54Z | |
dc.date.issued | 2005 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/11325 | |
dc.source | IIOimport | |
dc.title | Barrier reliability of ALD TaN on sub-100 nm copper low-k interconnects | |
dc.type | Proceedings paper | |
dc.contributor.imecauthor | Tokei, Zsolt | |
dc.contributor.imecauthor | Li, Yunlong | |
dc.contributor.imecauthor | Maex, Karen | |
dc.contributor.orcidimec | Li, Yunlong::0000-0003-4791-4013 | |
dc.date.embargo | 9999-12-31 | |
dc.source.peerreview | no | |
dc.source.beginpage | 801 | |
dc.source.endpage | 805 | |
dc.source.conference | Adanced Metallization Conference 2004 | |
dc.source.conferencedate | 19/10/2004 | |
dc.source.conferencelocation | San Diego, CA USA | |
imec.availability | Published - open access | |
imec.internalnotes | Conference Proceedings AMC XX | |