Publication:

Low damage etch approach of a new porous SiOC(H) Low-k dielectric

Date

2005

Proceedings Paper

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Author(s)

Van Aelst, Joke

;

Struyf, Herbert

;

;

Hendrickx, Dirk

;

Travaly, Youssef

;

Boullart, Werner

;

Vanhaelemeersch, Serge

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1990 since deposited on 2021-10-16

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Acq. date: 2026-02-26