Publication:
Low damage etch approach of a new porous SiOC(H) Low-k dielectric
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1995 since deposited on 2021-10-16
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Acq. date: 2026-08-07
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Statistics
Views
1995 since deposited on 2021-10-16
4last month
2last week
Acq. date: 2026-08-07
Citations