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Deep lithography with protons to prototype pluggable micro-optical out-of-plane coupling structures for multimode waveguides

dc.contributor.authorVan Erps, Jürgen
dc.contributor.authorVan Steenberge, Geert
dc.contributor.authorHendrickx, Nina
dc.contributor.authorGeerinck, Peter
dc.contributor.authorVolckaerts, Bart
dc.contributor.authorDebaes, Christophe
dc.contributor.authorVan Daele, Peter
dc.contributor.authorThienpont, Hugo
dc.date.accessioned2021-10-16T06:08:59Z
dc.date.available2021-10-16T06:08:59Z
dc.date.issued2005
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/11393
dc.sourceIIOimport
dc.titleDeep lithography with protons to prototype pluggable micro-optical out-of-plane coupling structures for multimode waveguides
dc.typeProceedings paper
dc.contributor.imecauthorVan Steenberge, Geert
dc.contributor.imecauthorVan Daele, Peter
dc.contributor.orcidimecVan Steenberge, Geert::0000-0001-8574-1235
dc.contributor.orcidimecVan Daele, Peter::0000-0003-0557-7741
dc.source.peerreviewno
dc.source.beginpage595608
dc.source.conferenceIntegrated Optics: Theory and Applications
dc.source.conferencedate28/08/2005
dc.source.conferencelocationWarsaw Poland
imec.availabilityPublished - imec
imec.internalnotesProceedings of SPIE; Vol. 5956


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