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Athermal germanium migration in strained silicon layers during junction formation with solid-phase epitaxial regrowth
Publication:
Athermal germanium migration in strained silicon layers during junction formation with solid-phase epitaxial regrowth
Date
2005
Journal article
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Vandervorst, Wilfried
;
Janssens, Tom
;
Brijs, Bert
;
Delhougne, Romain
;
Loo, Roger
;
Caymax, Matty
;
Pawlak, Bartek
;
Posselt, Matthias
Journal
Applied Physics Letters
Abstract
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2007
since deposited on 2021-10-16
Acq. date: 2025-10-24
Citations
Metrics
Views
2007
since deposited on 2021-10-16
Acq. date: 2025-10-24
Citations