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Athermal germanium migration in strained silicon layers during junction formation with solid-phase epitaxial regrowth
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Authors
Vandervorst, Wilfried
;
Janssens, Tom
;
Brijs, Bert
;
Delhougne, Romain
;
Loo, Roger
;
Caymax, Matty
;
Pawlak, Bartek
;
Posselt, Matthias
Issue
8
Journal
Applied Physics Letters
Volume
86
Title
Athermal germanium migration in strained silicon layers during junction formation with solid-phase epitaxial regrowth
Publication type
Journal article
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