Publication:

Ge-migration in s-Si-SiGe structures during implantation and annealing

Date

2005
Presentation
Simple item page Full metadata Statistics
Loading...
Thumbnail Image

Author(s)

Vandervorst, Wilfried  
;
Janssens, Tom
;
Geenen, Luc
;
Loo, Roger  
;
Caymax, Matty  
;
Delhougne, Romain  
;
Pawlak, Bartek  
;
Ravit, Claire

Journal

Abstract

Description

Statistics

Views

1951 since deposited on 2021-10-16
Acq. date: 2026-09-11

Citations

Statistics

Views

1951 since deposited on 2021-10-16
Acq. date: 2026-09-11

Citations