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Study of DC stress induced leakage current (SILC) and its dependence on oxide nitridation

dc.contributor.authorDe Blauwe, Jan
dc.contributor.authorDegraeve, Robin
dc.contributor.authorBellens, Rudi
dc.contributor.authorVan Houdt, Jan
dc.contributor.authorRoussel, Philippe
dc.contributor.authorGroeseneken, Guido
dc.contributor.authorMaes, Herman
dc.date.accessioned2021-09-29T14:21:21Z
dc.date.available2021-09-29T14:21:21Z
dc.date.issued1996
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/1149
dc.sourceIIOimport
dc.titleStudy of DC stress induced leakage current (SILC) and its dependence on oxide nitridation
dc.typeProceedings paper
dc.contributor.imecauthorDegraeve, Robin
dc.contributor.imecauthorVan Houdt, Jan
dc.contributor.imecauthorRoussel, Philippe
dc.contributor.imecauthorGroeseneken, Guido
dc.contributor.orcidimecVan Houdt, Jan::0000-0003-1381-6925
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage361
dc.source.endpage364
dc.source.conferenceProceedings of the 26th European Solid-State Device Research Conference - ESSDERC
dc.source.conferencedate9/09/1996
dc.source.conferencelocationBologna Italy
imec.availabilityPublished - open access


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