Study of DC stress induced leakage current (SILC) and its dependence on oxide nitridation

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Authors
De Blauwe, Jan; Degraeve, Robin; Bellens, Rudi; Van Houdt, Jan; Roussel, Philippe; Groeseneken, Guido; Maes, Herman
Conference
Proceedings of the 26th European Solid-State Device Research Conference - ESSDERC
Title
Study of DC stress induced leakage current (SILC) and its dependence on oxide nitridation
Publication type
Proceedings paper
Embargo date
9999-12-31
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