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Study of DC stress induced leakage current (SILC) and its dependence on oxide nitridation

Date

1996
Proceedings Paper
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dc.contributor.authorDe Blauwe, Jan
dc.contributor.authorDegraeve, Robin
dc.contributor.authorBellens, Rudi
dc.contributor.authorVan Houdt, Jan
dc.contributor.authorRoussel, Philippe
dc.contributor.authorGroeseneken, Guido
dc.contributor.authorMaes, Herman
dc.contributor.imecauthorDegraeve, Robin
dc.contributor.imecauthorVan Houdt, Jan
dc.contributor.imecauthorRoussel, Philippe
dc.contributor.imecauthorGroeseneken, Guido
dc.contributor.orcidimecVan Houdt, Jan::0000-0003-1381-6925
dc.date.accessioned2021-09-29T14:21:21Z
dc.date.available2021-09-29T14:21:21Z
dc.date.embargo9999-12-31
dc.date.issued1996
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/1149
dc.source.beginpage361
dc.source.conferenceProceedings of the 26th European Solid-State Device Research Conference - ESSDERC
dc.source.conferencedate9/09/1996
dc.source.conferencelocationBologna Italy
dc.source.endpage364
dc.title

Study of DC stress induced leakage current (SILC) and its dependence on oxide nitridation

dc.typeProceedings paper
dspace.entity.typePublication
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