Authors

De Bruyker, Dirk; Chévrier, Jean-Baptiste; Baert, Kris; Puers, Bob; Lowe, H.

Conference

Actuator 96. 5th International Conference on New Actuators. Conference Proceedings; 26-28 June 1996; Bremen, Germany.

Title

A silicon micromachined magnetic actuator using a two layer electroplating process

Publication type

Proceedings paper