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A silicon micromachined magnetic actuator using a two layer electroplating process

dc.contributor.authorDe Bruyker, Dirk
dc.contributor.authorChévrier, Jean-Baptiste
dc.contributor.authorBaert, Kris
dc.contributor.authorPuers, Bob
dc.contributor.authorLowe, H.
dc.date.accessioned2021-09-29T14:21:57Z
dc.date.available2021-09-29T14:21:57Z
dc.date.issued1996
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/1155
dc.sourceIIOimport
dc.titleA silicon micromachined magnetic actuator using a two layer electroplating process
dc.typeProceedings paper
dc.contributor.imecauthorPuers, Bob
dc.source.peerreviewno
dc.source.beginpage88
dc.source.endpage91
dc.source.conferenceActuator 96. 5th International Conference on New Actuators. Conference Proceedings; 26-28 June 1996; Bremen, Germany.
dc.source.conferencelocation
imec.availabilityPublished - imec


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