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Integration of tall triple-gate devices with inserted TaxNy gate in a 0.274μm² 6T-SRAM cell and advanced CMOS logic circuits

dc.contributor.authorWitters, Liesbeth
dc.contributor.authorCollaert, Nadine
dc.contributor.authorNackaerts, Axel
dc.contributor.authorDemand, Marc
dc.contributor.authorDemuynck, Steven
dc.contributor.authorDelvaux, Christie
dc.contributor.authorLauwers, Anne
dc.contributor.authorBaerts, Christina
dc.contributor.authorBeckx, Stephan
dc.contributor.authorBoullart, Werner
dc.contributor.authorBrus, Stephan
dc.contributor.authorDegroote, Bart
dc.contributor.authorde Marneffe, Jean-Francois
dc.contributor.authorDixit, Abhisek
dc.contributor.authorDe Meyer, Kristin
dc.contributor.authorErcken, Monique
dc.contributor.authorGoodwin, Michael
dc.contributor.authorHendrickx, Eric
dc.contributor.authorHeylen, Nancy
dc.contributor.authorJaenen, Patrick
dc.contributor.authorLaidler, David
dc.contributor.authorLeray, Philippe
dc.contributor.authorLocorotondo, Sabrina
dc.contributor.authorMaenhoudt, Mireille
dc.contributor.authorMoelants, Myriam
dc.contributor.authorPollentier, Ivan
dc.contributor.authorRonse, Kurt
dc.contributor.authorRooyackers, Rita
dc.contributor.authorVan Aelst, Joke
dc.contributor.authorVandenberghe, Geert
dc.contributor.authorVandeweyer, Tom
dc.contributor.authorVanhaelemeersch, Serge
dc.contributor.authorVan Hove, Marleen
dc.contributor.authorVan Olmen, Jan
dc.contributor.authorVerhaegen, Staf
dc.contributor.authorVersluijs, Janko
dc.contributor.authorVrancken, Christa
dc.contributor.authorWiaux, Vincent
dc.contributor.authorWillems, Patrick
dc.contributor.authorWouters, Johan M. D.
dc.contributor.authorJurczak, Gosia
dc.contributor.authorBiesemans, Serge
dc.date.accessioned2021-10-16T07:12:30Z
dc.date.available2021-10-16T07:12:30Z
dc.date.issued2005
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/11566
dc.sourceIIOimport
dc.titleIntegration of tall triple-gate devices with inserted TaxNy gate in a 0.274μm² 6T-SRAM cell and advanced CMOS logic circuits
dc.typeProceedings paper
dc.contributor.imecauthorWitters, Liesbeth
dc.contributor.imecauthorCollaert, Nadine
dc.contributor.imecauthorDemand, Marc
dc.contributor.imecauthorDemuynck, Steven
dc.contributor.imecauthorDelvaux, Christie
dc.contributor.imecauthorLauwers, Anne
dc.contributor.imecauthorBaerts, Christina
dc.contributor.imecauthorBeckx, Stephan
dc.contributor.imecauthorBoullart, Werner
dc.contributor.imecauthorBrus, Stephan
dc.contributor.imecauthorde Marneffe, Jean-Francois
dc.contributor.imecauthorDe Meyer, Kristin
dc.contributor.imecauthorErcken, Monique
dc.contributor.imecauthorHendrickx, Eric
dc.contributor.imecauthorHeylen, Nancy
dc.contributor.imecauthorJaenen, Patrick
dc.contributor.imecauthorLaidler, David
dc.contributor.imecauthorLeray, Philippe
dc.contributor.imecauthorLocorotondo, Sabrina
dc.contributor.imecauthorMoelants, Myriam
dc.contributor.imecauthorPollentier, Ivan
dc.contributor.imecauthorRonse, Kurt
dc.contributor.imecauthorVan Aelst, Joke
dc.contributor.imecauthorVandenberghe, Geert
dc.contributor.imecauthorVandeweyer, Tom
dc.contributor.imecauthorVanhaelemeersch, Serge
dc.contributor.imecauthorVan Olmen, Jan
dc.contributor.imecauthorVersluijs, Janko
dc.contributor.imecauthorVrancken, Christa
dc.contributor.imecauthorWiaux, Vincent
dc.contributor.imecauthorWillems, Patrick
dc.contributor.imecauthorWouters, Johan M. D.
dc.contributor.imecauthorJurczak, Gosia
dc.contributor.imecauthorBiesemans, Serge
dc.contributor.orcidimecCollaert, Nadine::0000-0002-8062-3165
dc.contributor.orcidimecBoullart, Werner::0000-0001-7614-2097
dc.contributor.orcidimecLaidler, David::0000-0003-4055-3366
dc.contributor.orcidimecPollentier, Ivan::0000-0002-4266-6500
dc.contributor.orcidimecRonse, Kurt::0000-0003-0803-4267
dc.contributor.orcidimecVanhaelemeersch, Serge::0000-0003-2102-7395
dc.contributor.orcidimecBrus, Stephan::0000-0003-3554-0640
dc.contributor.orcidimecde Marneffe, Jean-Francois::0000-0001-5178-6670
dc.contributor.orcidimecHendrickx, Eric::0000-0003-2516-0417
dc.contributor.orcidimecLeray, Philippe::0000-0002-1086-270X
dc.contributor.orcidimecWiaux, Vincent::0000-0002-8923-5708
dc.source.peerreviewno
dc.source.beginpage106
dc.source.endpage107
dc.source.conferenceSymposium on VLSI Technology. Digest of Technical Papers
dc.source.conferencedate14/06/2005
dc.source.conferencelocationKyoto Japan
imec.availabilityPublished - imec


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