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Integration of tall triple-gate devices with inserted TaxNy gate in a 0.274μm² 6T-SRAM cell and advanced CMOS logic circuits
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Authors
Witters, Liesbeth
;
Collaert, Nadine
;
Nackaerts, Axel
;
Demand, Marc
;
Demuynck, Steven
;
Delvaux, Christie
;
Lauwers, Anne
;
Baerts, Christina
;
Beckx, Stephan
;
Boullart, Werner
;
Brus, Stephan
;
Degroote, Bart
;
de Marneffe, Jean-Francois
;
Dixit, Abhisek
;
De Meyer, Kristin
;
Ercken, Monique
;
Goodwin, Michael
;
Hendrickx, Eric
;
Heylen, Nancy
;
Jaenen, Patrick
;
Laidler, David
;
Leray, Philippe
;
Locorotondo, Sabrina
;
Maenhoudt, Mireille
;
Moelants, Myriam
;
Pollentier, Ivan
;
Ronse, Kurt
;
Rooyackers, Rita
;
Van Aelst, Joke
;
Vandenberghe, Geert
;
Vandeweyer, Tom
;
Vanhaelemeersch, Serge
;
Van Hove, Marleen
;
Van Olmen, Jan
;
Verhaegen, Staf
;
Versluijs, Janko
;
Vrancken, Christa
;
Wiaux, Vincent
;
Willems, Patrick
;
Wouters, Johan M. D.
;
Jurczak, Gosia
;
Biesemans, Serge
Conference
Symposium on VLSI Technology. Digest of Technical Papers
Title
Integration of tall triple-gate devices with inserted TaxNy gate in a 0.274μm² 6T-SRAM cell and advanced CMOS logic circuits
Publication type
Proceedings paper
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