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Effects of voltage cycling on polarization and reliability of 3D SBT ferroelectric capacitors integrated in 0.18um CMOS technology
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Authors
Wouters, Dirk
;
Goux, Ludovic
;
Lisoni, Judit
;
Maes, David
;
Vander Meeren, Hans
;
Paraschiv, Vasile
;
Haspeslagh, Luc
;
Artoni, Cesari
;
Corallo, Giuseppina
;
Zambrano, Raffaele
Conference
Extended Abstracts of the International Conference on Solid State Devices and Materials
Title
Effects of voltage cycling on polarization and reliability of 3D SBT ferroelectric capacitors integrated in 0.18um CMOS technology
Publication type
Proceedings paper
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