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Effects of voltage cycling on polarization and reliability of 3D SBT ferroelectric capacitors integrated in 0.18um CMOS technology

dc.contributor.authorWouters, Dirk
dc.contributor.authorGoux, Ludovic
dc.contributor.authorLisoni, Judit
dc.contributor.authorMaes, David
dc.contributor.authorVander Meeren, Hans
dc.contributor.authorParaschiv, Vasile
dc.contributor.authorHaspeslagh, Luc
dc.contributor.authorArtoni, Cesari
dc.contributor.authorCorallo, Giuseppina
dc.contributor.authorZambrano, Raffaele
dc.date.accessioned2021-10-16T07:15:04Z
dc.date.available2021-10-16T07:15:04Z
dc.date.issued2005
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/11573
dc.sourceIIOimport
dc.titleEffects of voltage cycling on polarization and reliability of 3D SBT ferroelectric capacitors integrated in 0.18um CMOS technology
dc.typeProceedings paper
dc.contributor.imecauthorGoux, Ludovic
dc.contributor.imecauthorParaschiv, Vasile
dc.contributor.imecauthorHaspeslagh, Luc
dc.contributor.orcidimecGoux, Ludovic::0000-0002-1276-2278
dc.source.peerreviewyes
dc.source.beginpage640
dc.source.endpage641
dc.source.conferenceExtended Abstracts of the International Conference on Solid State Devices and Materials
dc.source.conferencedate12/09/2005
dc.source.conferencelocationKobe Japan
imec.availabilityPublished - imec


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