Authors

Xu, Kaidong; Vos, Rita; Vereecke, Guy; Doumen, Geert; Fyen, Wim; Mertens, Paul; Heyns, Marc; Vinckier, Chris; Fransaer, Jan

Conference

Ultra Clean Processing of Silicon Surfaces VII: Proceedings of the 7th International Symposium

Title

A force study in brush scrubbing

Publication type

Proceedings paper