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Impurity determination in narrow copper lines

dc.contributor.authorZhang, Wenqi
dc.contributor.authorBrongersma, Sywert
dc.contributor.authorConard, Thierry
dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorMaex, Karen
dc.date.accessioned2021-10-16T07:26:12Z
dc.date.available2021-10-16T07:26:12Z
dc.date.issued2005-01
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/11601
dc.sourceIIOimport
dc.titleImpurity determination in narrow copper lines
dc.typeProceedings paper
dc.contributor.imecauthorBrongersma, Sywert
dc.contributor.imecauthorConard, Thierry
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.imecauthorMaex, Karen
dc.contributor.orcidimecBrongersma, Sywert::0000-0002-1755-3897
dc.contributor.orcidimecConard, Thierry::0000-0002-4298-5851
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage347
dc.source.endpage352
dc.source.conferenceAdvanced Metallization Conference 2004
dc.source.conferencedate19/10/2004
dc.source.conferencelocationSan Diego, CA USA
imec.availabilityPublished - open access
imec.internalnotesConference Proceedings AMC XX


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