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Geometry effect on impurity incorporation and grain growth in narrow copper lines
Publication:
Geometry effect on impurity incorporation and grain growth in narrow copper lines
Date
2005
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Zhang, Wenqi
;
Brongersma, Sywert
;
Heylen, Nancy
;
Beyer, Gerald
;
Vandervorst, Wilfried
;
Maex, Karen
Journal
Journal of the Electrochemical Society
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1912
since deposited on 2021-10-16
Acq. date: 2025-10-23
Citations
Metrics
Views
1912
since deposited on 2021-10-16
Acq. date: 2025-10-23
Citations