Geometry effect on impurity incorporation and grain growth in narrow copper lines

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Authors

Zhang, Wenqi; Brongersma, Sywert; Heylen, Nancy; Beyer, Gerald; Vandervorst, Wilfried; Maex, Karen

Issue

12

Journal

Journal of the Electrochemical Society

Volume

152

Title

Geometry effect on impurity incorporation and grain growth in narrow copper lines

Publication type

Journal article

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