Properties and dynamic behavior of electron traps in HfO2/SiO2 stacks

Thumbnail
Metadata
Show full item record
Authors
Zhao, C.Z.; Zahid, Mohammed; Zhang, John; Groeseneken, Guido; Degraeve, Robin; De Gendt, Stefan
Journal
Microelectronic Engineering
Volume
80
Title
Properties and dynamic behavior of electron traps in HfO2/SiO2 stacks
Publication type
Journal article
Collections