Publication:

Ternary rare-earth metal oxide high-k layers on silicon oxide

Date

2005-03

Journal article

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Author(s)

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Witters, Thomas

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Richard, Olivier

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Afanasiev, Valeri

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Stesmans, Andre

Journal

Applied Physics Letters

Statistics

1876 since deposited on 2021-10-16

Acq. date: 2026-02-27