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Oxide CMP as a test vehicle for defectivity during CMP with composite polymer core – silica shell abrasives designed for scratch reduction during Cu CMP
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1931 since deposited on 2021-10-16
1last month
Acq. date: 2025-12-12
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Metrics
Views
1931 since deposited on 2021-10-16
1last month
Acq. date: 2025-12-12
Citations