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Oxide CMP as a test vehicle for defectivity during CMP with composite polymer core – silica shell abrasives designed for scratch reduction during Cu CMP
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1932 since deposited on 2021-10-16
Acq. date: 2026-04-06
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Statistics
Views
1932 since deposited on 2021-10-16
Acq. date: 2026-04-06
Citations