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Oxide CMP as a test vehicle for defectivity during CMP with composite polymer core – silica shell abrasives designed for scratch reduction during Cu CMP

dc.contributor.authorArmini, Silvia
dc.contributor.authorMoinpour, Mansour
dc.contributor.authorWhelan, Caroline
dc.contributor.authorMaex, Karen
dc.contributor.authorHernandez, Jose Luis
dc.date.accessioned2021-10-16T15:00:50Z
dc.date.available2021-10-16T15:00:50Z
dc.date.issued2007
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/11655
dc.sourceIIOimport
dc.titleOxide CMP as a test vehicle for defectivity during CMP with composite polymer core – silica shell abrasives designed for scratch reduction during Cu CMP
dc.typeProceedings paper
dc.contributor.imecauthorArmini, Silvia
dc.contributor.imecauthorMaex, Karen
dc.contributor.imecauthorHernandez, Jose Luis
dc.contributor.orcidimecArmini, Silvia::0000-0003-0578-3422
dc.source.peerreviewyes
dc.source.conferenceCMP-MIC Conference Proceedings
dc.source.conferencedate6/03/2007
dc.source.conferencelocationSan Jose, CA USA
imec.availabilityPublished - imec


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