Laser bonding of glass to silicon using polymer for microsystems packaging

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Authors

Bardin, Fabrice; Kloss, Stephan; Wang, Changhai; Moore, Andrew J.; Jourdain, Anne; De Wolf, Ingrid; Hand, Duncan P.

Issue

3

Journal

Journal of Microelectromechanical Systems

Volume

16

Title

Laser bonding of glass to silicon using polymer for microsystems packaging

Publication type

Journal article

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