Publication:
Analysis of the pre-epi bake conditions on the defect creation in recessed Si1-xGex S/D junctions
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1979 since deposited on 2021-10-16
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Acq. date: 2026-01-07
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1979 since deposited on 2021-10-16
2last month
1last week
Acq. date: 2026-01-07
Citations