Authors

Bargallo Gonzalez, Mireia; Thomas, Nicole; Simoen, Eddy; Verheyen, Peter; Hikavyy, Andriy; Leys, Frederik; Okuno, Yasutoshi; Vissouvanadin Soubaretty, Bertrand; Van Daele, Benny; Geenen, Luc; Loo, Roger; Claeys, Cor; Machkaoutsan, Vladimir; Tomasini, P.; Thomas, S.G.; Lu, J.P.; Weijtmans, J.W.; Wise, R.

Conference

Analytical and Diagnostic Techniques for Semiconductor Materials, Devices, and Processes 7

Title

Analysis of the pre-epi bake conditions on the defect creation in recessed Si1-xGex S/D junctions

Publication type

Proceedings paper

Embargo date

9999-12-31