Optimized illumination sources for through-pitch contact hole printing at 1.20 and 1.35NA.

Thumbnail
Metadata
Show full item record
Authors
Bekaert, Joost; Truffert, Vincent; Willems, Patrick; Van Look, Lieve; Op de Beeck, Maaike; Hendrickx, Eric; Vandenberghe, Geert
Conference
4th Immersion Symposium
Title
Optimized illumination sources for through-pitch contact hole printing at 1.20 and 1.35NA.
Publication type
Proceedings paper
Collections