Publication:

Optimized illumination sources for through-pitch contact hole printing at 1.20 and 1.35NA.

Date

2007

Proceedings Paper

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Author(s)

;

Truffert, Vincent

;

Willems, Patrick

;

Van Look, Lieve

;

Op de Beeck, Maaike

;

Hendrickx, Eric

;

Vandenberghe, Geert

Statistics

1972 since deposited on 2021-10-16

Acq. date: 2026-02-28