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Dual beam FIB/SEM cross-section imaging of nano-structures

dc.contributor.authorBender, Hugo
dc.contributor.authorDrijbooms, Chris
dc.contributor.authorVan Marcke, Patricia
dc.contributor.authorGeypen, Jef
dc.contributor.authorMarrant, Koen
dc.date.accessioned2021-10-16T15:03:42Z
dc.date.available2021-10-16T15:03:42Z
dc.date.issued2007
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/11714
dc.sourceIIOimport
dc.titleDual beam FIB/SEM cross-section imaging of nano-structures
dc.typeOral presentation
dc.contributor.imecauthorBender, Hugo
dc.contributor.imecauthorDrijbooms, Chris
dc.contributor.imecauthorVan Marcke, Patricia
dc.contributor.imecauthorGeypen, Jef
dc.source.peerreviewno
dc.source.conferenceFIBforAll
dc.source.conferencedate12/10/2007
dc.source.conferencelocationAntwerpen Belgium
imec.availabilityPublished - imec


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