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A platform for silicon-on-insulator nanophotonics on industrial CMOS tools

dc.contributor.authorBogaerts, Wim
dc.contributor.authorDumon, Pieter
dc.contributor.authorFedeli, J.M.
dc.contributor.authorTchelnokov, A.
dc.contributor.authorVan Thourhout, Dries
dc.contributor.authorSelvaraja, Shankar
dc.contributor.authorBaets, Roel
dc.date.accessioned2021-10-16T15:07:06Z
dc.date.available2021-10-16T15:07:06Z
dc.date.issued2007
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/11762
dc.sourceIIOimport
dc.titleA platform for silicon-on-insulator nanophotonics on industrial CMOS tools
dc.typeOral presentation
dc.contributor.imecauthorBogaerts, Wim
dc.contributor.imecauthorVan Thourhout, Dries
dc.contributor.imecauthorBaets, Roel
dc.contributor.orcidimecBogaerts, Wim::0000-0003-1112-8950
dc.contributor.orcidimecVan Thourhout, Dries::0000-0003-0111-431X
dc.contributor.orcidimecBaets, Roel::0000-0003-1266-1319
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.conferencePECS-VII: International Symposium on Photonic and Electromagnetic Crystal Structures
dc.source.conferencedate8/04/2007
dc.source.conferencelocationMonterey, CZ USA
imec.availabilityPublished - open access
imec.internalnotespaper A-14


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