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Quantitative carrier profiling of silicon devices by nano-srp

dc.contributor.authorDe Wolf, Peter
dc.contributor.authorClarysse, Trudo
dc.contributor.authorCaymax, Matty
dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorSnauwaerts, Jan
dc.contributor.authorHellemans, L.
dc.date.accessioned2021-09-29T14:24:15Z
dc.date.available2021-09-29T14:24:15Z
dc.date.issued1996
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/1178
dc.sourceIIOimport
dc.titleQuantitative carrier profiling of silicon devices by nano-srp
dc.typeOral presentation
dc.contributor.imecauthorCaymax, Matty
dc.contributor.imecauthorVandervorst, Wilfried
dc.source.peerreviewno
dc.source.conferenceNIST 3rd International Workshop on Industrial Applications of SPM; 2-3 May 1996; Gaithersburg, USA.
dc.source.conferencelocation
imec.availabilityPublished - imec


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