Authors

De Wolf, Peter; Clarysse, Trudo; Caymax, Matty; Vandervorst, Wilfried; Snauwaerts, Jan; Hellemans, L.

Conference

NIST 3rd International Workshop on Industrial Applications of SPM; 2-3 May 1996; Gaithersburg, USA.

Title

Quantitative carrier profiling of silicon devices by nano-srp

Publication type

Oral presentation