Publication:
Quantitative carrier profiling of silicon devices by nano-srp
Date
| dc.contributor.author | De Wolf, Peter | |
| dc.contributor.author | Clarysse, Trudo | |
| dc.contributor.author | Caymax, Matty | |
| dc.contributor.author | Vandervorst, Wilfried | |
| dc.contributor.author | Snauwaerts, Jan | |
| dc.contributor.author | Hellemans, L. | |
| dc.contributor.imecauthor | Caymax, Matty | |
| dc.contributor.imecauthor | Vandervorst, Wilfried | |
| dc.date.accessioned | 2021-09-29T14:24:15Z | |
| dc.date.available | 2021-09-29T14:24:15Z | |
| dc.date.issued | 1996 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/1178 | |
| dc.source.conference | NIST 3rd International Workshop on Industrial Applications of SPM; 2-3 May 1996; Gaithersburg, USA. | |
| dc.source.conferencelocation | ||
| dc.title | Quantitative carrier profiling of silicon devices by nano-srp | |
| dc.type | Oral presentation | |
| dspace.entity.type | Publication | |
| Files | ||
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