Authors

Buca, D.; Goryll, M.; Hollaender, B.; Trinkaus, H.; Mantl, S.; Loo, Roger; Nguyen, Duy

Conference

MRS 2007 Spring Meeting Symposium F: Semiconductor Defect Engineering - Materials, Synthetic Structures and Devices II

Title

Enhancement of the relaxation of SiGe layers by He ion implantation using a delta-Si:C layer

Publication type

Oral presentation