Authors
Chang, Vincent;
Ragnarsson, Lars-Ake;
Yu, HongYu;
Aoulaiche, Marc;
Conard, Thierry;
Yin, KaiMin;
Schram, Tom;
Maes, Jan Willem;
De Gendt, Stefan;
Biesemans, Serge
Issue
10
Journal
IEEE Trans. Electron Devices
Volume
54
Title
Effects of Al2O3 dielectric cap and nitridation on device performance, scalability, and reliability for advanced high-k/metal gate pMOSFET applications
Publication type
Journal article
