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FUSI specific yield monitoring enabling improved circuit performance and fast feedback to production

dc.contributor.authorChiarella, Thomas
dc.contributor.authorRosmeulen, Maarten
dc.contributor.authorTigelaar, Howard
dc.contributor.authorKerner, Christoph
dc.contributor.authorNackaerts, Axel
dc.contributor.authorRamos, Javier
dc.contributor.authorLauwers, Anne
dc.contributor.authorVeloso, Anabela
dc.contributor.authorJurczak, Gosia
dc.contributor.authorRothschild, Aude
dc.contributor.authorWitters, Liesbeth
dc.contributor.authorYu, HongYu
dc.contributor.authorKittl, Jorge
dc.contributor.authorVerbeeck, Rita
dc.contributor.authorde Potter de ten Broeck, Muriel
dc.contributor.authorDebusschere, Ingrid
dc.contributor.authorAbsil, Philippe
dc.contributor.authorBiesemans, Serge
dc.contributor.authorHoffmann, Thomas Y.
dc.date.accessioned2021-10-16T15:17:13Z
dc.date.available2021-10-16T15:17:13Z
dc.date.issued2007-03
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/11858
dc.sourceIIOimport
dc.titleFUSI specific yield monitoring enabling improved circuit performance and fast feedback to production
dc.typeProceedings paper
dc.contributor.imecauthorChiarella, Thomas
dc.contributor.imecauthorRosmeulen, Maarten
dc.contributor.imecauthorKerner, Christoph
dc.contributor.imecauthorLauwers, Anne
dc.contributor.imecauthorVeloso, Anabela
dc.contributor.imecauthorJurczak, Gosia
dc.contributor.imecauthorWitters, Liesbeth
dc.contributor.imecauthorVerbeeck, Rita
dc.contributor.imecauthorde Potter de ten Broeck, Muriel
dc.contributor.imecauthorDebusschere, Ingrid
dc.contributor.imecauthorAbsil, Philippe
dc.contributor.imecauthorBiesemans, Serge
dc.contributor.orcidimecChiarella, Thomas::0000-0002-6155-9030
dc.contributor.orcidimecRosmeulen, Maarten::0000-0002-3663-7439
dc.source.peerreviewno
dc.source.beginpage33
dc.source.endpage36
dc.source.conference20th IEEE International Conference on Microelectronic Test Structures - ICMTS
dc.source.conferencedate20/03/2007
dc.source.conferencelocationTokyo
imec.availabilityPublished - imec


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