FUSI specific yield monitoring enabling improved circuit performance and fast feedback to production

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Author(s)

Chiarella, Thomas

;

Rosmeulen, Maarten

;

Tigelaar, Howard

;

Kerner, Christoph

;

Nackaerts, Axel

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;

;

Veloso, Anabela

;

;

Rothschild, Aude

;

Witters, Liesbeth

;

;

;

;

de Potter de ten Broeck, Muriel

;

Debusschere, Ingrid

;

Absil, Philippe

;

Biesemans, Serge

;

Hoffmann, Thomas Y.

Metrics

2044 since deposited on 2021-10-16

Acq. date: 2025-10-23