Publication:

FUSI specific yield monitoring enabling improved circuit performance and fast feedback to production

Date

2007-03

Proceedings Paper

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Author(s)

Chiarella, Thomas

;

Rosmeulen, Maarten

;

Tigelaar, Howard

;

Kerner, Christoph

;

Nackaerts, Axel

;

;

;

Veloso, Anabela

;

;

Rothschild, Aude

;

Witters, Liesbeth

;

;

;

;

de Potter de ten Broeck, Muriel

;

Debusschere, Ingrid

;

Absil, Philippe

;

Biesemans, Serge

;

Hoffmann, Thomas Y.

Statistics

2050 since deposited on 2021-10-16

Acq. date: 2026-05-30