Publication:
FUSI specific yield monitoring enabling improved circuit performance and fast feedback to production
Date
| dc.contributor.author | Chiarella, Thomas | |
| dc.contributor.author | Rosmeulen, Maarten | |
| dc.contributor.author | Tigelaar, Howard | |
| dc.contributor.author | Kerner, Christoph | |
| dc.contributor.author | Nackaerts, Axel | |
| dc.contributor.author | Ramos, Javier | |
| dc.contributor.author | Lauwers, Anne | |
| dc.contributor.author | Veloso, Anabela | |
| dc.contributor.author | Jurczak, Gosia | |
| dc.contributor.author | Rothschild, Aude | |
| dc.contributor.author | Witters, Liesbeth | |
| dc.contributor.author | Yu, HongYu | |
| dc.contributor.author | Kittl, Jorge | |
| dc.contributor.author | Verbeeck, Rita | |
| dc.contributor.author | de Potter de ten Broeck, Muriel | |
| dc.contributor.author | Debusschere, Ingrid | |
| dc.contributor.author | Absil, Philippe | |
| dc.contributor.author | Biesemans, Serge | |
| dc.contributor.author | Hoffmann, Thomas Y. | |
| dc.contributor.imecauthor | Chiarella, Thomas | |
| dc.contributor.imecauthor | Rosmeulen, Maarten | |
| dc.contributor.imecauthor | Kerner, Christoph | |
| dc.contributor.imecauthor | Lauwers, Anne | |
| dc.contributor.imecauthor | Veloso, Anabela | |
| dc.contributor.imecauthor | Jurczak, Gosia | |
| dc.contributor.imecauthor | Witters, Liesbeth | |
| dc.contributor.imecauthor | Verbeeck, Rita | |
| dc.contributor.imecauthor | de Potter de ten Broeck, Muriel | |
| dc.contributor.imecauthor | Debusschere, Ingrid | |
| dc.contributor.imecauthor | Absil, Philippe | |
| dc.contributor.imecauthor | Biesemans, Serge | |
| dc.contributor.orcidimec | Chiarella, Thomas::0000-0002-6155-9030 | |
| dc.contributor.orcidimec | Rosmeulen, Maarten::0000-0002-3663-7439 | |
| dc.date.accessioned | 2021-10-16T15:17:13Z | |
| dc.date.available | 2021-10-16T15:17:13Z | |
| dc.date.issued | 2007-03 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/11858 | |
| dc.source.beginpage | 33 | |
| dc.source.conference | 20th IEEE International Conference on Microelectronic Test Structures - ICMTS | |
| dc.source.conferencedate | 20/03/2007 | |
| dc.source.conferencelocation | Tokyo | |
| dc.source.endpage | 36 | |
| dc.title | FUSI specific yield monitoring enabling improved circuit performance and fast feedback to production | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
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